IMS5400-TH70, interferoMETER, Cảm biến độ dày interferoMETER IMS5400-TH70, Đại lý Micro-Epsilon Việt Nam
The IMS5400-TH white light interferometer is used for highly accurate thickness measurements from a relatively large distance. A decisive advantage here is the distance-independent measurement, where a nanometer-accurate thickness value is achieved even with moving objects.
The large thickness measuring range allows the measurement of thin layers, flat glass and films. Since the white light interferometer works with an SLED in the near infrared range, thickness measurement of anti-reflective coated glass is also possible.
| Model | Working distance / Measuring range | Linearity | Number of measurable layers | Fields of application |
|---|---|---|---|---|
| IMS5400-TH45 | 45 mm ± 3,5 mm / 0,035 … 1.4 mm (for BK7,n=1.5) | ±100 nm | 1 layer | Industrial inline thickness measurement e.g. in flat glass production of single-layer glass |
| IMS5400-TH45/VAC | Inline thickness measurements in clean room environments and vacuum e.g. in display production for gap measurement in vacuum | |||
| IMS5400MP-TH45 | ±100 nm | Up to 5 layers | Industrial inline multi-layer measurement e.g. in flat glass production of multi-layer glasses |
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| IMS5400MP-TH45/VAC | Inline multi-layer measurements in clean room environments e.g. in display production for multi-layer measurement in vacuum | |||
| IMS5400-TH70 | 70 mm ± 2,1 mm / 0,035 … 1.4 mm (for BK7,n=1.5) | ±200 nm | 1 layer | Industrial inline thickness measurement e.g. in film production of single-layer films |
| IMS5400MP-TH70 | ±200 nm | Up to 5 layers | Industrial inline multi-layer measurement e.g. in film production of multi-layer films |
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